The M-60 is an advanced scanning microscope model that satisfies various analysis purposes. The SE (secondary electron) detector and the BSE (backscattered electron) detector can be selectively installed. The basic stage consists of three (manual) axes: X, Y, R. You can change the configuration to a five-axis automatic cascade using additional Z and Tilt axes if necessary. You can also change the configuration to either a desktop type or a tower (carrier) type type depending on the purpose and installation environment. Specifications IM-60 SERIESMODELTYPEIM-60-SMIM-60-DMIM-60-SAIM-60-daⅠ. Main parameters now 1 detector SESE+BSESESE+BSE2 Platform (Storke)X,Y(40㎜), R(360)
3-axis manual,Y(40㎜), R(360) 3-axis manual,Y(40㎜), R(360), Z (0~40㎜), Tilt(0~60˚) 5-axis motorized,Y(40㎜), R(360), Z (0~40㎜), Tilt(0~60˚) 5-axis motorized 3 Resolution 10 nm4 Accelerating voltage 5~30 kV5 Magnification 20X~60,000x6 Max sample size 80(D) x 40(H) mmⅡ. Electronic optics 1electronic push-tungsten (W) filament 2 Aperture(O.L)Single type 3 shift bundles.Y 100 microns (±50)Ⅲ. Image System 1 Display22 inch LCD2 format BMP,JPEG,PNG,TIFF3 OSWindows104 Scan mode 320×240,640×480,1280×960,2560×1280,5120×38405 Automationautofocus, contrast and brightness, stigmator, gun alignment (using the alignment coil)Ⅴ. Vacuum 1 Vacuum mode High vacuum 2 Pump system Initial vacuum: rotary(100 L), High vacuum: turbomolecular(80L) / Full automationⅥ. Dimensions 1 SEM480(W)x480(D)x1180mm, 90kg 2 Rotary pump400(W)x160(D)x340(H)mm, 24kgⅦ. Optional 1 SEMCCD CAMERA(navigation mode),Joystick controller 2 Option low vacuum, EDS, Platform cooling, STEM detector
