Secondary Ion Mass Spectrometer TOF-SIMS - SURFACESEER I
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SurfaceSeer I is a highly sensitive TOF-SIMS for visualization and chemical mapping of insulating and conductive surfaces.SurfaceSeer I is ideal for studying the chemical composition of surfaces and is equally well suited for research and development, as well as for industrial quality control. The SurfaceSeer I uses the same TOF-MS technology as the SurfaceSeer S, but is equipped with a 25 kV high spatial resolution and Spatial Resolution (LMIG) ion cannon as the primary ion source.Additional computer control allows you to scan the gun during mass spectral collection so that chemical images or maps can be collected.A secondary electron detector is also provided for tuning the primary beam. Specifications PRIMARY ION CANNON A high-performance liquid metal ion beam system (LMIG) designed to provide a range of ion beams for SIMS applications. It offers a wide range of current with the ability to accurately measure and constant or pulse mode.The digital control provides easy adjustment of the gun and includes remote control. The column of the gun consists of a source of liquid metal ions and a high-precision optical unit with two lenses, including: Stigmatization and alignment of units Diaphragm selection to provide a wide choice of output current (usually manual, but there is a motorized option) Optional mass filter used with alloy sources Deflecting plates for quenching the beam Additional pulse packet Raster plates for image processing DETECTION OF SECONDARY ELECTRONS For the TOF-SIMS imaging system, it is important to have a secondary electron imaging system. It has three main functions: For focusing the primary ion beam To allow the beam to be tuned to "stationary quenching" is a setting that allows the ion beam to be suppressed at high speed with minimal beam distortion (necessary for TOF-SIMS imaging) to produce ion-induced images of secondary electrons.This latter function can only be achieved with a continuous primary ion beam and is usually reserved when all analytical work on the sample is completed. The SED system contains a channel detector inside the analytical chamber, and the SED preamp is mounted on the outer flange.The power supply unit with SED controls is supplied on a separate electronic "sample viewing" unit. OPTICAL VIEWING When analyzing a surface, it is extremely useful to visually examine the sample to facilitate navigation and determine the correct location for subsequent analysis.Kore has developed a viewing system with the following capabilities: Magnification from ~ 3 mm to ~ 400 microns of the field of view. High lateral optical resolution at high magnification (<5 microns). The large working distance of 175 mm is ideal for ultra-high vacuum chambers where it is impossible to position the camera next to the sample. It is installed on a 70 mm CF exterior window. The color camera is mounted on a microscope. Dedicated color monitor. Cold dichroic halogen illuminator mounted on a 70 mm window lifter with an outer diameter. Power supplies for the illuminator and camera SAMPLE PROCESSING X, Y, Z Stage of high stability.The movements of the scene are ~ ± 10 mm in X and Y and 2 mm in Z. There is a concept of optimal height z, in which all rays are sophocular.The surface of the sample is brought to this position.If the sample is relatively thick > 1 mm, then there are two possibilities: The sample can be "set back", which means that the sample is located behind the mask, which is at the correct height.The maximum thickness of the sample that can be installed in this way is ~ 5 mm (5 x 8 x 20 mm) The sample is "mounted on top" on the sample holder with a cutout of 1 mm (deeper on request).For thicker samples mounted on top, you can use the z-axis height adjustment of the table to lower the sample holder so that the sample surface is positioned at the correct height.
Samples are pumped out for 2-10 minutes in a lock with a small volume, and then introduced into the analytical chamber (through a manual valve) by simply moving forward and turning 90 ° using a magnetically coupled sample entry rod.Porous or "wet" samples can take longer to pump out. DEFERRED MINING The device also uses a technique known as "delayed extraction" for the secondary ions produced.In this method, primary ions bombard the surface and produce analytically important secondary ions.Shortly after the pulse of the primary beam has completed the bombardment of the sample, the pulse extraction pulse field turns on.This leads not only to the extraction of secondary ions, but also to the compression of secondary ions when the ions pass through the analyzer to the detector.In some TOF-SIMS devices, the primary beam is compressed or "grouped", but secondary ions are grouped in this device.This delayed extraction is set so that secondary ions of the same m/z are focused in time to obtain a better mass resolution than would otherwise be obtained with a long primary pulse (60 ns). CHARGE NEUTRALIZATION One of the advantages of using a combination of pulsed ion beam/delayed extraction is that there are relatively long periods in each TOF cycle when the ion extraction field is not applied.During this period, a pulse of low-energy electrons (30 eV) is sent to the analytical zone.By doing this, it is possible to neutralize the effect of a positive charge that would otherwise accumulate on the surface, since the primary ion beam bombards the insulating sample. TOF ANALYZER The device has a 150 mm diameter reflectronic analyzer with a total effective flight length (including a flight tube) 2 meters.This is a two-slope reflectron with high-precision in-vacuo resistors, having an adjustable delay potential in the reflectron, which has been tuned for optimal spectral characteristics. VACUUM PUMPING Vacuum pump controllers are integrated into the main part of the device.Two ion pumps maintain the vacuum in the analytical chamber and the LMIG source. A turbomolecular pump based on a two-stage rotary pump is used to block the sample loading.Unloading and pumping of the cargo lock is carried out using a single manual button.A high-vacuum pressure gauge (inverted magnetron) continuously monitors the pressure in the analytical chamber and is used to provide a vacuum lockout by shutting off high voltages, if the pressure rises above the set value. STATIC SIMS LIBRARY The device will be equipped with a Static SIMS library Surface Spectra. This software has a mass spectral library of more than 1,900 spectra, covering data from more than 1,000 different materials.The software also has peak search tools that allow the analyst to enter mass peaks and search the library to identify unknown compounds and materials.